ASML Holding NV shares fell 3.7% following reports that TSMC will postpone deploying advanced lithography machines.

TSMC currently has no plans to adopt high-NA EUV technology for production through 2029. Each unit costs more than €350 million.

The delay challenges ASML's forecasts for high-volume production previously anticipated in 2027 and 2028. Investors are now weighing the impact on ASML's goal to reach €60 billion in annual revenue by 2030.